3/21/2012	9:28:54 AM	Main Vac valve closed
3/21/2012	9:28:55 AM	Main Vac valve opened
3/21/2012	11:52:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/21/2012	11:53:00 AM	Recipe started at 11:53 AM
3/21/2012	11:53:00 AM	Helium valve closed
3/21/2012	11:53:00 AM	H2 valve closed
3/21/2012	11:53:00 AM	BCl3 valve closed
3/21/2012	11:53:00 AM	PH3 valve closed
3/21/2012	11:53:00 AM	SiCl4 pre valve closed
3/21/2012	11:53:00 AM	SiCl4 post valve closed
3/21/2012	11:53:00 AM	Main Vac valve closed
3/21/2012	11:53:00 AM	Bypass valve closed
3/21/2012	11:53:00 AM	Bubbler valve closed
3/21/2012	11:53:00 AM	Helium MFC set to  0.000000
3/21/2012	11:53:00 AM	H2 MFC set to  0.000000
3/21/2012	11:53:00 AM	BCl3 MFC set to  0.000000
3/21/2012	11:53:00 AM	PH3 MFC set to  0.000000
3/21/2012	11:53:00 AM	SiCl4 MFC set to  0.000000
3/21/2012	11:53:00 AM	Bypass solenoid MFC set to  0.000000
3/21/2012	11:53:00 AM	Tube furnace set to 0
3/21/2012	11:53:04 AM	H2 valve closed
3/21/2012	11:53:04 AM	BCl3 valve closed
3/21/2012	11:53:04 AM	PH3 valve closed
3/21/2012	11:53:04 AM	SiCl4 pre valve closed
3/21/2012	11:53:04 AM	SiCl4 post valve closed
3/21/2012	11:53:04 AM	Main Vac valve closed
3/21/2012	11:53:04 AM	Bypass valve closed
3/21/2012	11:53:04 AM	Bubbler valve closed
3/21/2012	11:53:04 AM	Helium valve opened
3/21/2012	11:53:04 AM	Helium MFC set to  500.000000
3/21/2012	11:53:04 AM	H2 MFC set to  0.000000
3/21/2012	11:53:04 AM	BCl3 MFC set to  0.000000
3/21/2012	11:53:04 AM	PH3 MFC set to  0.000000
3/21/2012	11:53:04 AM	SiCl4 MFC set to  0.000000
3/21/2012	11:53:04 AM	Bypass solenoid MFC set to  0.000000
3/21/2012	11:53:04 AM	Tube furnace set to 0
3/21/2012	11:54:08 AM	Helium valve closed
3/21/2012	11:54:08 AM	H2 valve closed
3/21/2012	11:54:08 AM	BCl3 valve closed
3/21/2012	11:54:08 AM	PH3 valve closed
3/21/2012	11:54:08 AM	SiCl4 pre valve closed
3/21/2012	11:54:08 AM	SiCl4 post valve closed
3/21/2012	11:54:08 AM	Main Vac valve closed
3/21/2012	11:54:08 AM	Bypass valve closed
3/21/2012	11:54:09 AM	Bubbler valve closed
3/21/2012	11:54:09 AM	Helium MFC set to  0.000000
3/21/2012	11:54:09 AM	H2 MFC set to  0.000000
3/21/2012	11:54:09 AM	BCl3 MFC set to  0.000000
3/21/2012	11:54:09 AM	PH3 MFC set to  0.000000
3/21/2012	11:54:09 AM	SiCl4 MFC set to  0.000000
3/21/2012	11:54:09 AM	Bypass solenoid MFC set to  0.000000
3/21/2012	11:54:09 AM	Tube furnace set to 0
3/21/2012	11:54:10 AM	Run finished at 11:54 AM
3/21/2012	11:54:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/21/2012	11:57:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/21/2012	11:57:04 AM	Recipe started at 11:57 AM
3/21/2012	11:57:04 AM	Helium valve closed
3/21/2012	11:57:04 AM	H2 valve closed
3/21/2012	11:57:04 AM	BCl3 valve closed
3/21/2012	11:57:04 AM	PH3 valve closed
3/21/2012	11:57:04 AM	SiCl4 pre valve closed
3/21/2012	11:57:04 AM	SiCl4 post valve closed
3/21/2012	11:57:04 AM	Main Vac valve closed
3/21/2012	11:57:04 AM	Bubbler valve closed
3/21/2012	11:57:04 AM	Bypass valve opened
3/21/2012	11:57:04 AM	Helium MFC set to  0.000000
3/21/2012	11:57:04 AM	H2 MFC set to  0.000000
3/21/2012	11:57:04 AM	BCl3 MFC set to  0.000000
3/21/2012	11:57:04 AM	PH3 MFC set to  0.000000
3/21/2012	11:57:04 AM	SiCl4 MFC set to  0.000000
3/21/2012	11:57:04 AM	Bypass solenoid MFC set to  0.000000
3/21/2012	11:57:04 AM	Tube furnace set to 0
3/21/2012	11:58:05 AM	Helium valve closed
3/21/2012	11:58:05 AM	H2 valve closed
3/21/2012	11:58:05 AM	BCl3 valve closed
3/21/2012	11:58:05 AM	PH3 valve closed
3/21/2012	11:58:05 AM	SiCl4 pre valve closed
3/21/2012	11:58:05 AM	SiCl4 post valve closed
3/21/2012	11:58:05 AM	Main Vac valve closed
3/21/2012	11:58:05 AM	Bubbler valve closed
3/21/2012	11:58:05 AM	Bypass valve opened
3/21/2012	11:58:05 AM	Helium MFC set to  0.000000
3/21/2012	11:58:05 AM	H2 MFC set to  0.000000
3/21/2012	11:58:05 AM	BCl3 MFC set to  0.000000
3/21/2012	11:58:05 AM	PH3 MFC set to  0.000000
3/21/2012	11:58:05 AM	SiCl4 MFC set to  0.000000
3/21/2012	11:58:05 AM	Bypass solenoid MFC set to  0.000000
3/21/2012	11:58:06 AM	Tube furnace set to 0
3/21/2012	11:59:06 AM	Helium valve closed
3/21/2012	11:59:06 AM	H2 valve closed
3/21/2012	11:59:06 AM	BCl3 valve closed
3/21/2012	11:59:06 AM	PH3 valve closed
3/21/2012	11:59:06 AM	SiCl4 pre valve closed
3/21/2012	11:59:06 AM	SiCl4 post valve closed
3/21/2012	11:59:06 AM	Bypass valve closed
3/21/2012	11:59:06 AM	Bubbler valve closed
3/21/2012	11:59:06 AM	Main Vac valve opened
3/21/2012	11:59:06 AM	Helium MFC set to  0.000000
3/21/2012	11:59:06 AM	H2 MFC set to  0.000000
3/21/2012	11:59:06 AM	BCl3 MFC set to  0.000000
3/21/2012	11:59:06 AM	PH3 MFC set to  0.000000
3/21/2012	11:59:06 AM	SiCl4 MFC set to  0.000000
3/21/2012	11:59:06 AM	Bypass solenoid MFC set to  0.000000
3/21/2012	11:59:06 AM	Tube furnace set to 0
3/21/2012	11:59:07 AM	Run finished at 11:59 AM
3/21/2012	11:59:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
